Microelectromechanical sensors for measuring gas pressure

Measuring volumes with gas mass flow sensors.

With some design care, a mass flow sensor, pressure transducer and a temperature sensor can provide a fast and accurate method of measuring many difficult volumes.

Pressure transducer method for measuring gas production by microorganisms.

A simple method for measuring gas production by microorganisms by using a pressure transducer to sense pressure buildup was developed and tested with members of the coliform group. The test system consisted of a 5.0 lb/in(2) pressure transducer and a pressure equalizer valve attached to the metal cap of a test tube (20 by 150 mm); gas pressure was recorded on a strip-chart recorder. Gas pressur...

Piezoelectric microelectromechanical resonant sensors for chemical and biological detection.

Piezoelectric microelectromechanical systems (MEMS) resonant sensors, known for their excellent mass resolution, have been studied for many applications, including DNA hybridization, protein-ligand interactions, and immunosensor development. They have also been explored for detecting antigens, organic gas, toxic ions, and explosives. Most piezoelectric MEMS resonant sensors are acoustic sensors...

Magnetic Field Sensors Based on Microelectromechanical Systems (MEMS) Technology

Nowdays there is an increasing requirement for magnetic devices with improved sensitivity and resolution, trying to keep as low as possible their cost and power consumption. Additionally there is the need to develop compact devices with several sensors able to measure different parameters including magnetic field, pressure, temperature, acceleration. In this way a multifunctional device could b...

Carbon nanotubes as piezoresistive microelectromechanical sensors: Theory and experiment